Fermi level pinning on Si[sub 0.83]Ge[sub 0.17] surface by inductively coupled plasma treatment

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ژورنال

عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

سال: 2005

ISSN: 0734-211X

DOI: 10.1116/1.1868652